Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

摘要

Many applications of thin films necessitate detailed information about their thicknesses and\udsound velocities. Here, we study SiO2/LiNbO3 layer systems by picosecond photoacoustic metrology\udand measure the sound velocities of the respective layers and the film thickness of SiO2, which pose\udcrucial information for the fabrication of surface-acoustic-wave filters for communication technology.\udAdditionally, we utilize the birefringence and the accompanying change in the detection sensitivity\udof coherent acoustic phonons in the LiNbO3 layer to infer information about the LiNbO3 orientation\udand the layer interface.